Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10546764 | Substrate cleaning apparatus and substrate processing apparatus | Akira Imamura, Mitsuru Miyazaki, Junji Kunisawa | 2020-01-28 |
| 9849488 | Unit control panel, substrate transfer test method, and substrate processing apparatus | Masafumi Inoue | 2017-12-26 |