Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11090692 | Cleaning liquid supplying system, substrate processing apparatus and substrate processing system | Mitsuru Miyazaki, Akira Imamura, Takuya Inoue | 2021-08-17 |
| 9821429 | Polishing pad and chemical mechanical polishing apparatus for polishing a workpiece, and method of polishing a workpiece using the chemical mechanical polishing apparatus | Yu Ishii, Kenya Ito, Mika Suzuki | 2017-11-21 |
| 4590541 | Organic semiconductor compositions and solid electrolytic capacitor using the same | Susumu Yoshimura, Junji Ozaki | 1986-05-20 |