| 7040968 |
Polishing apparatus |
Kenji Kamimura, Norio Kimura, Satoshi Okamura, Hideo Aizawa, Makoto Akagi +2 more |
2006-05-09 |
| 6942548 |
Polishing method using an abrading plate |
Yutaka Wada, Hirokuni Hiyama, Kazuto Hirokawa |
2005-09-13 |
| 6939208 |
Polishing apparatus |
Kenji Kamimura, Norio Kimura, Satoshi Okamura, Hideo Aizawa, Makoto Akagi +2 more |
2005-09-06 |
| 6712678 |
Polishing-product discharging device and polishing device |
Yutaka Wada, Hirokuni Hiyama, Kazuto Hirokawa |
2004-03-30 |
| 6672945 |
Polishing apparatus and dressing method |
Hirokuni Hiyama, Yutaka Wada, Kazuto Hirokawa |
2004-01-06 |
| 6626739 |
Polishing method and polishing apparatus |
Yutaka Wada, Hirokuni Hiyama, Kazuto Hirokawa |
2003-09-30 |
| 6595831 |
Method for polishing workpieces using fixed abrasives |
Kazuto Hirokawa, Hirokuni Hiyama, Yutaka Wada, Noburu Shimizu |
2003-07-22 |
| 6579148 |
Polishing apparatus |
Kazuto Hirokawa, Hirokuni Hiyama, Yutaka Wada, Tetsuji Togawa |
2003-06-17 |
| 6520845 |
Polishing apparatus |
Kazuto Hirokawa, Hirokuni Hiyama, Yutaka Wada |
2003-02-18 |
| 6458012 |
Polishing apparatus |
Kazuto Hirokawa, Hirokuni Hiyama, Yutaka Wada, Tetsuji Togawa |
2002-10-01 |
| 6413149 |
Abrading plate and polishing method using the same |
Yutaka Wada, Hirokuni Hiyama, Kazuto Hirokawa |
2002-07-02 |
| 6413155 |
Polishing apparatus |
Hirokuni Hiyama, Yutaka Wada, Kazuto Hirokawa |
2002-07-02 |
| 6402588 |
Polishing apparatus |
Hirokuni Hiyama, Yutaka Wada, Kazuto Hirokawa |
2002-06-11 |
| 6398626 |
Polishing apparatus |
Hirokuni Hiyama, Yutaka Wada, Kazuto Hirokawa, Tetsuji Togawa |
2002-06-04 |
| 6390901 |
Polishing apparatus |
Hirokuni Hiyama, Yutaka Wada, Kazuto Hirokawa, Tetsuji Togawa, Satoshi Wakabayashi |
2002-05-21 |
| 6336850 |
Slurry dispenser and polishing apparatus |
Yutaka Wada, Hirokuni Hiyama, Kazuto Hirokawa |
2002-01-08 |
| 6261162 |
Polishing apparatus and method of manufacturing grinding plate |
Kazuto Hirokawa, Hirokuni Hiyama, Yutaka Wada |
2001-07-17 |
| 6220945 |
Polishing apparatus |
Kazuto Hirokawa, Hirokuni Hiyama, Yutaka Wada |
2001-04-24 |
| 6217411 |
Polishing apparatus |
Hirokuni Hiyama, Yutaka Wada, Kazuto Hirokawa |
2001-04-17 |
| 6196904 |
Polishing apparatus |
Hirokuni Hiyama, Yutaka Wada, Kazuto Hirokawa |
2001-03-06 |
| 6190243 |
Polishing apparatus |
Yutaka Wada, Hirokuni Hiyama, Kazuto Hirokawa |
2001-02-20 |