Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8241426 | CMP polishing method, CMP polishing apparatus, and process for producing semiconductor device | Hisanori Matsuo, Akira Ishikawa | 2012-08-14 |
| 7384622 | Zeolite nano-crystal suspension, zeolite nano-crystal production method, zeolite nano-crystal suspension production method, and zeolite thin film | Nobuhiro Hata, Guoqing Guan, Takenobu Yoshino | 2008-06-10 |