HO

HIROFUMI OTAKI

EB Ebara: 2 patents #752 of 1,611Top 50%
Overall (All Time): #1,996,244 of 4,157,543Top 50%
2
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
9847263 Substrate processing method including reprocessing rejected wafers Tsuneo Torikoshi 2017-12-19
9524913 Polishing method and polishing apparatus Tsuneo Torikoshi 2016-12-20