Issued Patents All Time
Showing 26–32 of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9067296 | Polishing method | Katsutoshi Ono, Hisanori Matsuo, Kuniaki Yamaguchi | 2015-06-30 |
| 8360817 | Polishing apparatus and polishing method | Yoichi Shiokawa, Jyoji Heianna, Hisanori Matsuo | 2013-01-29 |
| 7837534 | Apparatus for heating or cooling a polishing surface of a polishing apparatus | Shunichi Aiyoshizawa, Ryuichi Kosuge, Ryo Kato | 2010-11-23 |
| 7291057 | Apparatus for polishing a substrate | Norio Kimura, Hirokuni Hiyama, Katsuya Okumura, Hiroyuki Yano | 2007-11-06 |
| 6609950 | Method for polishing a substrate | Norio Kimura, Hirokuni Hiyama, Katsuya Okumura, Hiroyuki Yano | 2003-08-26 |
| 6544111 | Polishing apparatus and polishing table therefor | Norio Kimura | 2003-04-08 |
| 6186872 | Polisher | Norio Kimura | 2001-02-13 |