Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11414742 | Substrate processing apparatus, substrate processing method, and storage medium | Hideaki Yamasaki | 2022-08-16 |
| 10242878 | Substrate processing method and recording medium | Kyohei NOGUCHI, Osamu Yokoyama, Takashi Kobayashi, Satoshi Wakabayashi, Takashi Sakuma | 2019-03-26 |