Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12090529 | Method of cleaning stage in plasma processing apparatus, and the plasma processing apparatus | Junichi Sasaki | 2024-09-17 |
| 11865591 | Method of cleaning stage in plasma processing apparatus, and the plasma processing apparatus | Junichi Sasaki | 2024-01-09 |
| 10192719 | Plasma processing method | Akitoshi Harada, Hideaki Yakushiji | 2019-01-29 |
| 9330891 | Plasma processing method and plasma processing apparatus | Ryo Nonaka, Masanori Sato, Natsuki Yabumoto, Akitoshi Harada, Junichi Sasaki +1 more | 2016-05-03 |
| 8263181 | Ti-based film forming method and storage medium | Kensaku Narushima, Satoshi Wakabayashi | 2012-09-11 |
| 6004031 | Temperature measuring device | Zenkichi Yamanaka, Yoshiro Yamada, Yasushi Kaneda | 1999-12-21 |
| 5730527 | Method and apparatus for measuring temperature using an optical fiber | Yoshiro Yamada | 1998-03-24 |
| 5438415 | Ellipsometer and method of controlling coating thickness therewith | Akira Kazama, Takahiko Oshige, Yoshiro Yamada, Takeo Yamada, Takeshi Yamazaki +1 more | 1995-08-01 |