Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11578639 | Fan shroud and blower device | Hidetake Ota | 2023-02-14 |
| 11022842 | Planar light source device and display device | Kyouhei Yamada | 2021-06-01 |
| 10418258 | Mounting table temperature control device and substrate processing apparatus | — | 2019-09-17 |
| 10408417 | Light-emitting device with light flux control member having prismatic elements on bottom surface forming acute angle with side edge of light source | Yasuyuki Fukuda | 2019-09-10 |
| D778334 | Lens for light emitting diode | Hiroshi Takatori, Yasuyuki Fukuda | 2017-02-07 |
| 9330891 | Plasma processing method and plasma processing apparatus | Masanori Sato, Natsuki Yabumoto, Takamitsu TAKAYAMA, Akitoshi Harada, Junichi Sasaki +1 more | 2016-05-03 |
| 8950469 | Temperature control system and temperature control method for substrate mounting table | Yasuharu Sasaki, Nobuyuki Nagayama | 2015-02-10 |
| 8132580 | Substrate processing system and substrate cleaning apparatus including a jetting apparatus | Tsuyoshi Moriya, Tadashi Onishi, Eiichi Nishimura | 2012-03-13 |
| 7988062 | Temperature control device for target substrate, temperature control method and plasma processing apparatus including same | Koichi Murakami | 2011-08-02 |
| 7230202 | Plasma processing apparatus, electrode unit, feeder member and radio frequency feeder rod | Daisuke Hayashi, Kazuya Nagaseki, Shinji Himori, Atsushi Matsuura | 2007-06-12 |
| 7005660 | Surface processing apparatus | Minoru Honda, Kazuyuki Mitsuoka | 2006-02-28 |
| 6492612 | Plasma apparatus and lower electrode thereof | Chihiro Taguchi | 2002-12-10 |
| 6074518 | Plasma processing apparatus | Kosuke Imafuku, Shosuke Endo, Kazuhiro Tahara, Hiroshi Tsuchiya, Masayuki Tomoyasu +6 more | 2000-06-13 |
| 5997962 | Plasma process utilizing an electrostatic chuck | Masahiro Ogasawara, Yoshiyuki Kobayashi | 1999-12-07 |
| 5914568 | Plasma processing apparatus | — | 1999-06-22 |
| 5310453 | Plasma process method using an electrostatic chuck | Kazuo Fukasawa, Kousuke Imafuku | 1994-05-10 |