Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7544393 | Substrate table, production method therefor and plasma treating device | Shinji Muto, Nobuyuki Okayama | 2009-06-09 |
| 7067178 | Substrate table, production method therefor and plasma treating device | Shinji Muto, Nobuyuki Okayama | 2006-06-27 |
| 6492612 | Plasma apparatus and lower electrode thereof | Ryo Nonaka | 2002-12-10 |