Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8550875 | Method of operating substrate processing apparatus and substrate processing apparatus | Hiroomi Torii, Hiroaki Nishida, Hiroyuki Kaneko, Takashi Mitsuya, Takamasa Nakamura | 2013-10-08 |
| 8202139 | Method of operating substrate processing apparatus and substrate processing apparatus | Hiroomi Torii, Hiroaki Nishida, Hiroyuki Kaneko, Takashi Mitsuya, Takamasa Nakamura | 2012-06-19 |