Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8133380 | Method for regenerating ion exchanger | Takayuki Saito, Yuji Makita, Kaoru Yamada, Masayuki Kumekawa, Hozumi Yasuda +5 more | 2012-03-13 |
| 7638030 | Electrolytic processing apparatus and electrolytic processing method | Osamu Nabeya, Masayuki Kumekawa, Hozumi Yasuda, Itsuki Kobata, Takeshi Iizumi +7 more | 2009-12-29 |
| 7563356 | Composite processing apparatus and method | Osamu Nabeya, Takayuki Saito, Yasushi Toma, Ikutaro Noji | 2009-07-21 |
| 7527723 | Electrolytic processing apparatus and electrolytic processing method | Itsuki Kobata, Yutaka Wada, Hirokuni Hiyama, Takayuki Saito, Yasushi Toma +1 more | 2009-05-05 |
| 7476290 | Substrate processing apparatus and substrate processing method | Takayuki Saito, Kaoru Yamada, Kenya Ito, Masayuki Kamezawa, Kenji Yamaguchi | 2009-01-13 |
| 7427345 | Method and device for regenerating ion exchanger, and electrolytic processing apparatus | Takayuki Saito, Yuji Makita, Kaoru Yamada, Masayuki Kumekawa, Hozumi Yasuda +5 more | 2008-09-23 |
| 7208076 | Substrate processing apparatus and method | Itsuki Kobata, Mitsuhiko Shirakashi, Masayuki Kumekawa, Takayuki Saito, Yasushi Toma +3 more | 2007-04-24 |
| 7101465 | Electrolytic processing device and substrate processing apparatus | Itsuki Kobata, Mitsuhiko Shirakashi, Masayuki Kumekawa, Takayuki Saito, Yasushi Toma +3 more | 2006-09-05 |
| 7029518 | Method and apparatus for the preparation of clean gases | Toshiaki Fujii, Hidetomo Suzuki, Kazuhiko Sakamoto | 2006-04-18 |
| 6932884 | Substrate processing apparatus | Takayuki Saito, Yuji Makita, Kaoru Yamada, Mitsuhiko Shirakashi, Kenya Ito | 2005-08-23 |
| 6911064 | Method and apparatus for the preparation of clean gases | Toshiaki Fujii, Hidetomo Suzuki, Kazuhiko Sakamoto | 2005-06-28 |
| 6733570 | Method and apparatus for the preparation of clean gases | Toshiaki Fujii, Hidetomo Suzuki, Kazuhiko Sakamoto | 2004-05-11 |
| 6340381 | Method and apparatus for the preparation of clean gases | Toshiaki Fujii, Hidetomo Suzuki, Kazuhiko Sakamoto | 2002-01-22 |
| 5922105 | Method and apparatus for the preparation of clean gases | Toshiaki Fujii, Hidetomo Suzuki, Kazuhiko Sakamoto | 1999-07-13 |