Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7578886 | Substrate processing apparatus, substrate processing method, and substrate holding apparatus | Kaoru Yamada, Takayuki Saito, Sumio Yabe, Kenya Ito, Masaya Seki +2 more | 2009-08-25 |
| 7476290 | Substrate processing apparatus and substrate processing method | Takayuki Saito, Tsukuru Suzuki, Kaoru Yamada, Kenya Ito, Kenji Yamaguchi | 2009-01-13 |