Issued Patents All Time
Showing 1–25 of 96 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12381089 | Information processing system, information processing method, program, and substrate processing apparatus | Keisuke Namiki, Osamu Nabeya | 2025-08-05 |
| 12230529 | Substrate holding apparatus, substrate suction determination method, substrate polishing apparatus, substrate polishing method, method of removing liquid from upper surface of wafer to be polished, elastic film for pressing wafer against polishing pad, substrate release method, and constant amount gas supply apparatus | Osamu Nabeya, Satoru Yamaki | 2025-02-18 |
| 12128523 | Polishing apparatus | Hozumi Yasuda, Keisuke Namiki, Osamu Nabeya, Shingo Togashi, Satoru Yamaki | 2024-10-29 |
| 12068189 | Elastic membrane, substrate holding device, and polishing apparatus | Satoru Yamaki, Keisuke Namiki, Osamu Nabeya, Shingo Togashi, Tomoko Owada +1 more | 2024-08-20 |
| 11969858 | Substrate processing apparatus | Keisuke Namiki | 2024-04-30 |
| 11958163 | Substrate holding apparatus, elastic membrane, polishing apparatus, and method for replacing elastic membrane | Osamu Nabeya, Keisuke Namiki, Shingo Togashi, Satoru Yamaki, Masahiko Kishimoto +1 more | 2024-04-16 |
| 11745306 | Polishing apparatus and method of controlling inclination of stationary ring | Tomoko Owada, Keisuke Namiki, Osamu Nabeya, Shingo Togashi, Satoru Yamaki +1 more | 2023-09-05 |
| 11731235 | Polishing apparatus and polishing method | Shingo Togashi, Keisuke Namiki, Osamu Nabeya, Satoru Yamaki, Tomoko Owada +1 more | 2023-08-22 |
| D981969 | Elastic membrane for semiconductor wafer polishing apparatus | Kenichi Akazawa, Tomoko Owada, Osamu Nabeya, Yuichi Kato | 2023-03-28 |
| 11548113 | Method and apparatus for polishing a substrate | Tetsuji Togawa, Shingo Togashi, Tomoshi Inoue | 2023-01-10 |
| 11478895 | Substrate holding device, substrate polishing apparatus, and method of manufacturing the substrate holding device | Shingo Togashi, Hozumi Yasuda, Osamu Nabeya | 2022-10-25 |
| 11472001 | Elastic membrane and substrate holding apparatus | Cheng Cheng, Shingo Togashi, Kazuto Hirokawa | 2022-10-18 |
| 11472000 | Substrate adsorption method, substrate holding apparatus, substrate polishing apparatus, elastic film, substrate adsorption determination method for substrate holding apparatus, and pressure control method for substrate holding apparatus | Hiroyuki Shinozaki, Osamu Nabeya | 2022-10-18 |
| 11224956 | Polishing apparatus | Osamu Nabeya, Tetsuji Togawa, Hozumi Yasuda | 2022-01-18 |
| 11179823 | Substrate holding apparatus, elastic membrane, polishing apparatus, and method for replacing elastic membrane | Osamu Nabeya, Keisuke Namiki, Shingo Togashi, Satoru Yamaki, Masahiko Kishimoto +1 more | 2021-11-23 |
| 11088011 | Elastic membrane, substrate holding device, and polishing apparatus | Satoru Yamaki, Keisuke Namiki, Osamu Nabeya, Shingo Togashi, Tomoko Owada +1 more | 2021-08-10 |
| D918161 | Elastic membrane | Shingo Togashi, Keisuke Namiki, Osamu Nabeya, Satoru Yamaki, Tomoko Owada +1 more | 2021-05-04 |
| 10991613 | Substrate holding apparatus, substrate suction determination method, substrate polishing apparatus, substrate polishing method, method of removing liquid from upper surface of wafer to be polished, elastic film for pressing wafer against polishing pad, substrate release method, and constant amount gas supply apparatus | Osamu Nabeya, Satoru Yamaki | 2021-04-27 |
| D913977 | Elastic membrane for semiconductor wafer polishing | Satoru Yamaki, Keisuke Namiki, Osamu Nabeya, Shingo Togashi, Tomoko Owada +1 more | 2021-03-23 |
| 10702972 | Polishing apparatus | Hozumi Yasuda, Keisuke Namiki, Osamu Nabeya, Shingo Togashi, Satoru Yamaki | 2020-07-07 |
| 10537975 | Substrate adsorption method, substrate holding apparatus, substrate polishing apparatus, elastic film, substrate adsorption determination method for substrate holding apparatus, and pressure control method for substrate holding apparatus | Hiroyuki Shinozaki, Osamu Nabeya | 2020-01-21 |
| 10486284 | Substrate holding device, and substrate polishing apparatus | Shingo Togashi, Hozumi Yasuda, Osamu Nabeya | 2019-11-26 |
| 10464185 | Substrate polishing method, top ring, and substrate polishing apparatus | Shintaro ISONO, Hozumi Yasuda, Keisuke Namiki, Osamu Nabeya, Shingo Togashi +1 more | 2019-11-05 |
| 10442056 | Substrate holding apparatus and polishing apparatus | Keisuke Namiki, Hozumi Yasuda, Osamu Nabeya | 2019-10-15 |
| 10414015 | Polishing apparatus and polishing method | Hozumi Yasuda, Shingo Togashi | 2019-09-17 |