Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10464185 | Substrate polishing method, top ring, and substrate polishing apparatus | Hozumi Yasuda, Keisuke Namiki, Osamu Nabeya, Makoto Fukushima, Shingo Togashi +1 more | 2019-11-05 |
| 10391603 | Polishing apparatus, control method and recording medium | Satoru Yamaki, Hozumi Yasuda, Keisuke Namiki, Osamu Nabeya, Makoto Fukushima +1 more | 2019-08-27 |
| 10213896 | Elastic membrane, substrate holding apparatus, and polishing apparatus | Makoto Fukushima, Hozumi Yasuda, Keisuke Namiki, Osamu Nabeya, Shingo Togashi +1 more | 2019-02-26 |
| 9999956 | Polishing device and polishing method | Keisuke Namiki, Hozumi Yasuda, Osamu Nabeya, Makoto Fukushima, Shingo Togashi +1 more | 2018-06-19 |
| 9573244 | Elastic membrane, substrate holding apparatus, and polishing apparatus | Makoto Fukushima, Hozumi Yasuda, Keisuke Namiki, Osamu Nabeya, Shingo Togashi +1 more | 2017-02-21 |