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Substrate polishing method, top ring, and substrate polishing apparatus |
Hozumi Yasuda, Keisuke Namiki, Osamu Nabeya, Makoto Fukushima, Shingo Togashi +1 more |
2019-11-05 |
| 10391603 |
Polishing apparatus, control method and recording medium |
Satoru Yamaki, Hozumi Yasuda, Keisuke Namiki, Osamu Nabeya, Makoto Fukushima +1 more |
2019-08-27 |
| 10213896 |
Elastic membrane, substrate holding apparatus, and polishing apparatus |
Makoto Fukushima, Hozumi Yasuda, Keisuke Namiki, Osamu Nabeya, Shingo Togashi +1 more |
2019-02-26 |
| 9999956 |
Polishing device and polishing method |
Keisuke Namiki, Hozumi Yasuda, Osamu Nabeya, Makoto Fukushima, Shingo Togashi +1 more |
2018-06-19 |
| 9573244 |
Elastic membrane, substrate holding apparatus, and polishing apparatus |
Makoto Fukushima, Hozumi Yasuda, Keisuke Namiki, Osamu Nabeya, Shingo Togashi +1 more |
2017-02-21 |