Issued Patents All Time
Showing 26–50 of 96 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D859332 | Elastic membrane for semiconductor wafer polishing | Satoru Yamaki, Keisuke Namiki, Osamu Nabeya, Shingo Togashi, Tomoko Owada | 2019-09-10 |
| 10391603 | Polishing apparatus, control method and recording medium | Satoru Yamaki, Hozumi Yasuda, Keisuke Namiki, Osamu Nabeya, Shingo Togashi +1 more | 2019-08-27 |
| 10307882 | Method and apparatus for polishing a substrate | Tetsuji Togawa, Shingo Togashi, Tomoshi Inoue | 2019-06-04 |
| 10293455 | Polishing apparatus | Osamu Nabeya, Tetsuji Togawa, Hozumi Yasuda | 2019-05-21 |
| 10213896 | Elastic membrane, substrate holding apparatus, and polishing apparatus | Hozumi Yasuda, Keisuke Namiki, Osamu Nabeya, Shingo Togashi, Satoru Yamaki +1 more | 2019-02-26 |
| D839224 | Elastic membrane for semiconductor wafer polishing | Satoru Yamaki, Keisuke Namiki, Osamu Nabeya, Shingo Togashi, Tomoko Owada +1 more | 2019-01-29 |
| 10092992 | Polishing apparatus, polishing head, and retainer ring | Hozumi Yasuda, Osamu Nabeya | 2018-10-09 |
| 10040166 | Polishing apparatus | Osamu Nabeya, Tetsuji Togawa, Hozumi Yasuda | 2018-08-07 |
| 9999956 | Polishing device and polishing method | Keisuke Namiki, Hozumi Yasuda, Osamu Nabeya, Shingo Togashi, Satoru Yamaki +1 more | 2018-06-19 |
| D813180 | Elastic membrane for semiconductor wafer polishing apparatus | Hozumi Yasuda, Keisuke Namiki, Osamu Nabeya, Shingo Togashi, Satoru Yamaki | 2018-03-20 |
| 9884401 | Elastic membrane and substrate holding apparatus | Hozumi Yasuda, Osamu Nabeya, Shingo Togashi | 2018-02-06 |
| D808349 | Elastic membrane for semiconductor wafer polishing apparatus | Hozumi Yasuda, Keisuke Namiki, Osamu Nabeya, Shingo Togashi, Satoru Yamaki | 2018-01-23 |
| 9815171 | Substrate holder, polishing apparatus, polishing method, and retaining ring | Satoru Yamaki, Hozumi Yasuda, Keisuke Namiki, Osamu Nabeya, Shingo Togashi | 2017-11-14 |
| D799437 | Substrate retaining ring | Osamu Nabeya, Hozumi Yasuda, Shingo Togashi, Keisuke Namiki, Satoru Yamaki | 2017-10-10 |
| D794585 | Retainer ring for substrate | Osamu Nabeya, Hozumi Yasuda, Keisuke Namiki, Shingo Togashi, Satoru Yamaki | 2017-08-15 |
| 9724797 | Polishing apparatus | Osamu Nabeya, Tetsuji Togawa, Hozumi Yasuda | 2017-08-08 |
| D793976 | Substrate retaining ring | Hozumi Yasuda, Keisuke Namiki, Osamu Nabeya, Shingo Togashi, Satoru Yamaki | 2017-08-08 |
| 9662764 | Substrate holder, polishing apparatus, and polishing method | Hozumi Yasuda, Keisuke Namiki, Osamu Nabeya, Shingo Togashi, Satoru Yamaki | 2017-05-30 |
| 9573241 | Polishing apparatus and polishing method | Hozumi Yasuda, Keisuke Namiki | 2017-02-21 |
| 9573244 | Elastic membrane, substrate holding apparatus, and polishing apparatus | Hozumi Yasuda, Keisuke Namiki, Osamu Nabeya, Shingo Togashi, Satoru Yamaki +1 more | 2017-02-21 |
| 9550271 | Substrate holding apparatus and polishing apparatus | Hozumi Yasuda, Osamu Nabeya, Masahiko Kishimoto | 2017-01-24 |
| D770990 | Elastic membrane for semiconductor wafer polishing apparatus | Hozumi Yasuda, Keisuke Namiki, Osamu Nabeya, Shingo Togashi, Satoru Yamaki | 2016-11-08 |
| D769200 | Elastic membrane for semiconductor wafer polishing apparatus | Hozumi Yasuda, Keisuke Namiki, Osamu Nabeya, Shingo Togashi, Satoru Yamaki | 2016-10-18 |
| D766849 | Substrate retaining ring | Hozumi Yasuda, Keisuke Namiki, Osamu Nabeya, Shingo Togashi, Satoru Yamaki | 2016-09-20 |
| 9403255 | Polishing apparatus and polishing method | Hozumi Yasuda, Keisuke Namiki, Osamu Nabeya, Shingo Togashi, Satoru Yamaki | 2016-08-02 |