Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11548113 | Method and apparatus for polishing a substrate | Makoto Fukushima, Tetsuji Togawa, Shingo Togashi | 2023-01-10 |
| 10307882 | Method and apparatus for polishing a substrate | Makoto Fukushima, Tetsuji Togawa, Shingo Togashi | 2019-06-04 |
| 9308621 | Method and apparatus for polishing a substrate | Makoto Fukushima, Tetsuji Togawa, Shingo Saito | 2016-04-12 |
| 8485866 | Substrate holding apparatus, polishing apparatus, and polishing method | Hozumi Yasuda, Tetsuji Togawa, Osamu Nabeya, Kenichiro Saito, Makoto Fukushima | 2013-07-16 |
| 8357029 | Polishing apparatus | Makoto Fukushima, Tetsuji Togawa, Hozumi Yasuda, Koji Saito, Osamu Nabeya | 2013-01-22 |
| 8267746 | Substrate holding apparatus, polishing apparatus, and polishing method | Hozumi Yasuda, Tetsuji Togawa, Osamu Nabeya, Kenichiro Saito, Makoto Fukushima | 2012-09-18 |
| 8100739 | Substrate holding apparatus, polishing apparatus, and polishing method | Hozumi Yasuda, Tetsuji Togawa, Osamu Nabeya, Kenichiro Saito, Makoto Fukushima | 2012-01-24 |
| 7967665 | Substrate holding apparatus, polishing apparatus, and polishing method | Hozumi Yasuda, Tetsuji Togawa, Osamu Nabeya, Kenichiro Saito, Makoto Fukushima | 2011-06-28 |
| D634719 | Elastic membrane for semiconductor wafer polishing apparatus | Hozumi Yasuda, Keisuke Namiki, Makoto Fukushima, Osamu Nabeya, Koji Saito +3 more | 2011-03-22 |