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Method and apparatus for polishing a substrate |
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2023-01-10 |
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Method and apparatus for polishing a substrate |
Makoto Fukushima, Tetsuji Togawa, Shingo Togashi |
2019-06-04 |
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Method and apparatus for polishing a substrate |
Makoto Fukushima, Tetsuji Togawa, Shingo Saito |
2016-04-12 |
| 8485866 |
Substrate holding apparatus, polishing apparatus, and polishing method |
Hozumi Yasuda, Tetsuji Togawa, Osamu Nabeya, Kenichiro Saito, Makoto Fukushima |
2013-07-16 |
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Polishing apparatus |
Makoto Fukushima, Tetsuji Togawa, Hozumi Yasuda, Koji Saito, Osamu Nabeya |
2013-01-22 |
| 8267746 |
Substrate holding apparatus, polishing apparatus, and polishing method |
Hozumi Yasuda, Tetsuji Togawa, Osamu Nabeya, Kenichiro Saito, Makoto Fukushima |
2012-09-18 |
| 8100739 |
Substrate holding apparatus, polishing apparatus, and polishing method |
Hozumi Yasuda, Tetsuji Togawa, Osamu Nabeya, Kenichiro Saito, Makoto Fukushima |
2012-01-24 |
| 7967665 |
Substrate holding apparatus, polishing apparatus, and polishing method |
Hozumi Yasuda, Tetsuji Togawa, Osamu Nabeya, Kenichiro Saito, Makoto Fukushima |
2011-06-28 |
| D634719 |
Elastic membrane for semiconductor wafer polishing apparatus |
Hozumi Yasuda, Keisuke Namiki, Makoto Fukushima, Osamu Nabeya, Koji Saito +3 more |
2011-03-22 |