Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12068189 | Elastic membrane, substrate holding device, and polishing apparatus | Satoru Yamaki, Makoto Fukushima, Keisuke Namiki, Osamu Nabeya, Shingo Togashi +1 more | 2024-08-20 |
| 11958163 | Substrate holding apparatus, elastic membrane, polishing apparatus, and method for replacing elastic membrane | Osamu Nabeya, Makoto Fukushima, Keisuke Namiki, Shingo Togashi, Satoru Yamaki +1 more | 2024-04-16 |
| D1021832 | Elastic membrane | Kenichi Akazawa, Osamu Nabeya, Shingo Togashi, Satoru Yamaki, Cheng Cheng +1 more | 2024-04-09 |
| 11745306 | Polishing apparatus and method of controlling inclination of stationary ring | Makoto Fukushima, Keisuke Namiki, Osamu Nabeya, Shingo Togashi, Satoru Yamaki +1 more | 2023-09-05 |
| 11731235 | Polishing apparatus and polishing method | Shingo Togashi, Makoto Fukushima, Keisuke Namiki, Osamu Nabeya, Satoru Yamaki +1 more | 2023-08-22 |
| D989012 | Elastic membrane | Kenichi Akazawa, Osamu Nabeya, Shingo Togashi, Satoru Yamaki, Cheng Cheng +1 more | 2023-06-13 |
| 11654524 | Method of detecting abnormality of a roller which transmits a local load to a retainer ring, and polishing apparatus | Osamu Nabeya, Yuta Suzuki, Shingo Togashi | 2023-05-23 |
| D981969 | Elastic membrane for semiconductor wafer polishing apparatus | Kenichi Akazawa, Osamu Nabeya, Makoto Fukushima, Yuichi Kato | 2023-03-28 |
| 11179823 | Substrate holding apparatus, elastic membrane, polishing apparatus, and method for replacing elastic membrane | Osamu Nabeya, Makoto Fukushima, Keisuke Namiki, Shingo Togashi, Satoru Yamaki +1 more | 2021-11-23 |
| 11088011 | Elastic membrane, substrate holding device, and polishing apparatus | Satoru Yamaki, Makoto Fukushima, Keisuke Namiki, Osamu Nabeya, Shingo Togashi +1 more | 2021-08-10 |
| D918161 | Elastic membrane | Shingo Togashi, Makoto Fukushima, Keisuke Namiki, Osamu Nabeya, Satoru Yamaki +1 more | 2021-05-04 |
| D913977 | Elastic membrane for semiconductor wafer polishing | Satoru Yamaki, Makoto Fukushima, Keisuke Namiki, Osamu Nabeya, Shingo Togashi +1 more | 2021-03-23 |
| D859332 | Elastic membrane for semiconductor wafer polishing | Satoru Yamaki, Makoto Fukushima, Keisuke Namiki, Osamu Nabeya, Shingo Togashi | 2019-09-10 |
| D839224 | Elastic membrane for semiconductor wafer polishing | Satoru Yamaki, Makoto Fukushima, Keisuke Namiki, Osamu Nabeya, Shingo Togashi +1 more | 2019-01-29 |