| 12068189 |
Elastic membrane, substrate holding device, and polishing apparatus |
Satoru Yamaki, Makoto Fukushima, Keisuke Namiki, Osamu Nabeya, Shingo Togashi +1 more |
2024-08-20 |
| 11958163 |
Substrate holding apparatus, elastic membrane, polishing apparatus, and method for replacing elastic membrane |
Osamu Nabeya, Makoto Fukushima, Keisuke Namiki, Shingo Togashi, Satoru Yamaki +1 more |
2024-04-16 |
| D1021832 |
Elastic membrane |
Kenichi Akazawa, Osamu Nabeya, Shingo Togashi, Satoru Yamaki, Cheng Cheng +1 more |
2024-04-09 |
| 11745306 |
Polishing apparatus and method of controlling inclination of stationary ring |
Makoto Fukushima, Keisuke Namiki, Osamu Nabeya, Shingo Togashi, Satoru Yamaki +1 more |
2023-09-05 |
| 11731235 |
Polishing apparatus and polishing method |
Shingo Togashi, Makoto Fukushima, Keisuke Namiki, Osamu Nabeya, Satoru Yamaki +1 more |
2023-08-22 |
| D989012 |
Elastic membrane |
Kenichi Akazawa, Osamu Nabeya, Shingo Togashi, Satoru Yamaki, Cheng Cheng +1 more |
2023-06-13 |
| 11654524 |
Method of detecting abnormality of a roller which transmits a local load to a retainer ring, and polishing apparatus |
Osamu Nabeya, Yuta Suzuki, Shingo Togashi |
2023-05-23 |
| D981969 |
Elastic membrane for semiconductor wafer polishing apparatus |
Kenichi Akazawa, Osamu Nabeya, Makoto Fukushima, Yuichi Kato |
2023-03-28 |
| 11179823 |
Substrate holding apparatus, elastic membrane, polishing apparatus, and method for replacing elastic membrane |
Osamu Nabeya, Makoto Fukushima, Keisuke Namiki, Shingo Togashi, Satoru Yamaki +1 more |
2021-11-23 |
| 11088011 |
Elastic membrane, substrate holding device, and polishing apparatus |
Satoru Yamaki, Makoto Fukushima, Keisuke Namiki, Osamu Nabeya, Shingo Togashi +1 more |
2021-08-10 |
| D918161 |
Elastic membrane |
Shingo Togashi, Makoto Fukushima, Keisuke Namiki, Osamu Nabeya, Satoru Yamaki +1 more |
2021-05-04 |
| D913977 |
Elastic membrane for semiconductor wafer polishing |
Satoru Yamaki, Makoto Fukushima, Keisuke Namiki, Osamu Nabeya, Shingo Togashi +1 more |
2021-03-23 |
| D859332 |
Elastic membrane for semiconductor wafer polishing |
Satoru Yamaki, Makoto Fukushima, Keisuke Namiki, Osamu Nabeya, Shingo Togashi |
2019-09-10 |
| D839224 |
Elastic membrane for semiconductor wafer polishing |
Satoru Yamaki, Makoto Fukushima, Keisuke Namiki, Osamu Nabeya, Shingo Togashi +1 more |
2019-01-29 |