Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12241738 | Detection signal processing apparatus and detection signal processing method for eddy current sensor | Hiroto Yamada, Taro Takahashi | 2025-03-04 |
| 12179310 | Output signal processing apparatus for eddy current sensor | Atsushi Abe, Taro Takahashi, Shinpei Tokunaga, Katsuhide Watanabe | 2024-12-31 |
| 12123714 | Output signal processing circuit for eddy current sensor and output signal processing method for eddy current sensor | Hiroto Yamada, Taro Takahashi, Atsushi Abe, Shinpei Tokunaga | 2024-10-22 |
| 12083646 | Polishing apparatus, polishing method and method for outputting visualization information of film thickness distribution on substrate | Taro Takahashi, Toshiki Miyakawa | 2024-09-10 |
| 11852472 | Output signal processing circuit for eddy current sensor and output signal processing method for eddy current sensor | Hiroto Yamada, Taro Takahashi, Atsushi Abe, Shinpei Tokunaga | 2023-12-26 |
| 11759912 | Magnetic element and eddy current sensor using the same | Taro Takahashi, Katsuhide Watanabe | 2023-09-19 |
| 11731233 | Eddy current detection device and polishing apparatus | Taro Takahashi, Shinpei Tokunaga | 2023-08-22 |
| 10933507 | Polishing apparatus | Taro Takahashi, Akira Nakamura, Mitsuo Tada | 2021-03-02 |
| 9437507 | Method of correcting film thickness measurement value, film thickness corrector and eddy current sensor | Akira Nakamura, Yasumasa Hiroo, Hiroshi Ota, Taro Takahashi, Mitsuo Tada | 2016-09-06 |