Issued Patents All Time
Showing 26–50 of 53 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10163664 | Substrate cleaning apparatus and substrate cleaning method | — | 2018-12-25 |
| 10090189 | Substrate cleaning apparatus comprising a second jet nozzle surrounding a first jet nozzle | — | 2018-10-02 |
| D822926 | Sponge for substrate cleaning | — | 2018-07-10 |
| 10008380 | Substrate drying apparatus, substrate drying method and control program | Takahiro Ogawa, Kenichi Sugita, Shinji Kajita, Koichi Fukaya, Akira Nakamura | 2018-06-26 |
| 10002778 | Substrate cleaning apparatus | — | 2018-06-19 |
| D805268 | Sponge for substrate cleaning | — | 2017-12-12 |
| 9824903 | Substrate cleaning apparatus | — | 2017-11-21 |
| D800401 | Roller for substrate cleaning | — | 2017-10-17 |
| D799768 | Roller for substrate cleaning | — | 2017-10-10 |
| D799129 | Sponge for substrate cleaning | — | 2017-10-03 |
| 9677811 | Substrate cleaning and drying apparatus | — | 2017-06-13 |
| D787143 | Sponge for substrate cleaning | — | 2017-05-16 |
| 9643216 | Cleaning device, method of manufacturing the same and substrate cleaning apparatus | — | 2017-05-09 |
| 9640384 | Substrate cleaning apparatus and substrate cleaning method | — | 2017-05-02 |
| 9630296 | Substrate processing apparatus | — | 2017-04-25 |
| 9466512 | Substrate cleaning apparatus and substrate processing apparatus | — | 2016-10-11 |
| 9194903 | Surface potential measuring apparatus and surface potential measuring method | — | 2015-11-24 |
| 9162337 | Polishing apparatus | — | 2015-10-20 |
| 9142398 | Substrate processing method | — | 2015-09-22 |
| 9142399 | Substrate cleaning method | — | 2015-09-22 |
| D735427 | Roller shaft for substrate cleaning | Hiroshi Kojima | 2015-07-28 |
| 9058977 | Substrate cleaning apparatus and substrate cleaning method | — | 2015-06-16 |
| D728177 | Roller shaft for substrate cleaning | Hiroshi Kojima | 2015-04-28 |
| 9011605 | Substrate cleaning method and roll cleaning member | — | 2015-04-21 |
| 8932407 | Substrate cleaning method | — | 2015-01-13 |