Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12033847 | Cleaning module, substrate processing apparatus including cleaning module, and cleaning method | Toshio Mizuno, Yosuke Himori, Tomoatsu Ishibashi, Itsuki Kobata | 2024-07-09 |