Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12154797 | Substrate processing method and substrate processing apparatus | Itsuki Kobata | 2024-11-26 |
| 12033847 | Cleaning module, substrate processing apparatus including cleaning module, and cleaning method | Toshio Mizuno, Erina Baba, Tomoatsu Ishibashi, Itsuki Kobata | 2024-07-09 |
| 11011609 | Method of manufacturing a semiconductor device | Kenya Kobayashi, Tetsuo Matsuda, Toshifumi Nishiguchi | 2021-05-18 |
| 9947751 | Semiconductor device and method of manufacturing the same | Kenya Kobayashi, Tetsuo Matsuda, Toshifumi Nishiguchi | 2018-04-17 |
| 9795999 | Substrate processing apparatus and substrate processing method | Takashi Ootagaki, Konosuke Hayashi | 2017-10-24 |