Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12063721 | Heater | Koichi Kimura, Akira Mikumo | 2024-08-13 |
| 12033880 | Wafer holding body | Koichi Kimura, Kenji Shinma, Daisuke Shimao, Katsuhiro Itakura, Masuhiro Natsuhara +1 more | 2024-07-09 |
| 11732359 | Wafer holder | Koichi Kimura, Akira Mikumo, Daisuke Shimao | 2023-08-22 |
| 11195701 | Showerhead | Koichi Kimura, Akira Mikumo | 2021-12-07 |
| 10886157 | Wafer holding unit | Koichi Kimura, Kenji Shinma, Daisuke Shimao, Katsuhiro Itakura, Masuhiro Natsuhara +1 more | 2021-01-05 |