Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12063721 | Heater | Shigenobu SAKITA, Koichi Kimura | 2024-08-13 |
| 12046488 | Semiconductor manufacturing apparatus and wafer holding table for semiconductor manufacturing apparatus | Koichi Kimura | 2024-07-23 |
| 12033880 | Wafer holding body | Koichi Kimura, Shigenobu SAKITA, Kenji Shinma, Daisuke Shimao, Katsuhiro Itakura +1 more | 2024-07-09 |
| 11732359 | Wafer holder | Koichi Kimura, Shigenobu SAKITA, Daisuke Shimao | 2023-08-22 |
| 11239057 | Showerhead and method for manufacturing the same | Koichi Kimura | 2022-02-01 |
| 11195701 | Showerhead | Koichi Kimura, Shigenobu SAKITA | 2021-12-07 |
| 11127605 | Wafer holder | Koichi Kimura | 2021-09-21 |
| 10886157 | Wafer holding unit | Koichi Kimura, Shigenobu SAKITA, Kenji Shinma, Daisuke Shimao, Katsuhiro Itakura +1 more | 2021-01-05 |
| 7554059 | Heater unit and semiconductor manufacturing apparatus including the same | Tomoyuki Awazu, Masuhiro Natsuhara, Hirohiko Nakata | 2009-06-30 |
| 6777376 | Superconducting wire | Tetsuyuki Kaneko, Munetsugu Ueyama, Naoki Ayai, Shin-ichi Kobayasi | 2004-08-17 |
| 6493925 | Manufacturing method of superconducting wire | Tetsuyuki Kaneko, Munetsugu Ueyama, Naoki Ayai, Shin Kobayashi | 2002-12-17 |
| 5891585 | Nb.sub.3 Al multi-filamentary superconducting wire | Naoki Ayai, Yuichi Yamada, Kenichi Takahashi, Norikiyo Koizumi, Toshinari Ando +2 more | 1999-04-06 |
| 5779864 | Apparatus for adjusting sectional area ratio of metal-covered electric wire | Kenichi Takahashi, Masanobu Koganeya | 1998-07-14 |
| 5602488 | Method and apparatus for adjusting sectional area ratio of metal-covered electric wire | Kenichi Takahashi, Masanobu Koganeya | 1997-02-11 |
| 5507924 | Method and apparatus for adjusting sectional area ratio of metal-covered electric wire | Kenichi Takahashi, Masanobu Koganeya | 1996-04-16 |