Issued Patents All Time
Showing 25 most recent of 68 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7999210 | Heating device for manufacturing semiconductor | Akira Kuibira, Masuhiro Natsuhara | 2011-08-16 |
| 7855569 | Wafer holder for wafer prober and wafer prober equipped with the same | Masuhiro Natsuhara, Katsuhiro Itakura | 2010-12-21 |
| 7837798 | Semiconductor processing apparatus with a heat resistant hermetically sealed substrate support | Akira Kuibira, Masuhiro Natsuhara | 2010-11-23 |
| 7806984 | Semiconductor or liquid crystal producing device | Akira Kuibira, Masuhiro Natsuhara | 2010-10-05 |
| 7618494 | Substrate holding structure and substrate processing device | Sumi Tanaka, Tetsuya Saito, Masuhiro Natsuhara | 2009-11-17 |
| 7576303 | Wafer holder, and wafer prober provided therewith | Masuhiro Natsuhara, Tomoyuki Awazu, Katsuhiro Itakura | 2009-08-18 |
| 7554059 | Heater unit and semiconductor manufacturing apparatus including the same | Tomoyuki Awazu, Akira Mikumo, Masuhiro Natsuhara | 2009-06-30 |
| 7495460 | Body for keeping a wafer, heater unit and wafer prober | Katsuhiro Itakura, Masuhiro Natsuhara | 2009-02-24 |
| 7491432 | Ceramic susceptor for semiconductor manufacturing equipment | Yoshifumi Kachi, Akira Kuibira | 2009-02-17 |
| 7425838 | Body for keeping a wafer and wafer prober using the same | Katsuhiro Itakura, Masuhiro Natsuhara | 2008-09-16 |
| 7414823 | Holder for use in semiconductor or liquid-crystal manufacturing device and semiconductor or liquid-crystal manufacturing device in which the holder is installed | Manabu Hashikura, Akira Kuibira, Masuhiro Natsuhara | 2008-08-19 |
| 7408131 | Wafer holder and semiconductor manufacturing apparatus | Masuhiro Natsuhara, Akira Kuibira, Manabu Hashikura | 2008-08-05 |
| 7394043 | Ceramic susceptor | Akira Kuibira, Masuhiro Natsuhara | 2008-07-01 |
| 7361230 | Substrate processing apparatus | Masuhiro Natsuhara, Akira Kuibira, Kenji Shinma | 2008-04-22 |
| 7341969 | Aluminum nitride sintered body | Masuhiro Natsuhara | 2008-03-11 |
| 7342204 | Heater and heating device | Masuhiro Natsuhara, Kenji Shinma | 2008-03-11 |
| 7306858 | Aluminum nitride sintered body | Masuhiro Natsuhara, Kenji Shinma | 2007-12-11 |
| 7279048 | Semiconductor manufacturing apparatus | Kenji Shinma, Masuhiro Natsuhara | 2007-10-09 |
| 7268322 | Semiconductor heating apparatus | Akira Kuibira, Kenji Shinma | 2007-09-11 |
| 7268321 | Wafer holder and semiconductor manufacturing apparatus | Masuhiro Natsuhara, Akira Kuibira, Manabu Hashikura | 2007-09-11 |
| 7264699 | Workpiece holder for processing apparatus, and processing apparatus using the same | Masuhiro Natsuhara, Akira Kuibira | 2007-09-04 |
| 7211153 | Ceramic joined body, substrate holding structure and substrate processing apparatus | Akira Kuibira, Masuhiro Natsuhara | 2007-05-01 |
| 7177536 | Fluid heating heater | Masuhiro Natsuhara | 2007-02-13 |
| 7145106 | Heater module for semiconductor manufacturing equipment | Akira Kuibira | 2006-12-05 |
| 7090394 | Temperature gauge and ceramic susceptor in which it is utilized | Manabu Hashikura, Masuhiro Natsuhara, Akira Kuibira | 2006-08-15 |