Issued Patents All Time
Showing 26–50 of 68 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7090394 | Temperature gauge and ceramic susceptor in which it is utilized | Manabu Hashikura, Masuhiro Natsuhara, Akira Kuibira | 2006-08-15 |
| 7045045 | Workpiece holder for processing apparatus, and processing apparatus using the same | Masuhiro Natsuhara, Akira Kuibira | 2006-05-16 |
| 6963052 | Heater module for semiconductor manufacturing equipment | Akira Kuibira | 2005-11-08 |
| 6946625 | Ceramic susceptor | Akira Kuibira, Masuhiro Natsuhara | 2005-09-20 |
| 6881128 | Ceramics base plate and method for producing the same | Masuhiro Natsuhara | 2005-04-19 |
| 6806443 | Ceramic susceptor | Akira Kuibira, Masuhiro Natsuhara | 2004-10-19 |
| 6783867 | Member for semiconductor device using an aluminum nitride substrate material, and method of manufacturing the same | Kazutaka Sasaki, Akira Sasame, Mitsunori Kobayashi | 2004-08-31 |
| 6770379 | Susceptor for semiconductor manufacturing equipment and process for producing the same | Yasuhisa Yushio, Masuhiro Natsuhara | 2004-08-03 |
| 6716304 | Wafer holder for semiconductor manufacturing apparatus, and method of manufacturing the wafer holder | Akira Kuibira, Kenjiro Higaki, Masuhiro Natsuhara, Takashi Ishii, Yasuyuki Matsui | 2004-04-06 |
| 6696103 | Aluminium nitride ceramics and method for preparing the same | Kouhei Shimoda, Kazuya Kamitake, Kazutaka Sasaki, Masuhiro Natsuhara, Harutoshi Ukegawa | 2004-02-24 |
| 6671489 | Thermal fixing apparatus | Masuhiro Natsuhara | 2003-12-30 |
| 6664515 | Circuit pattern of resistance heating elements and substrate-treating apparatus incorporating the pattern | Masuhiro Natsuhara, Masashi Narita, Akira Kuibira | 2003-12-16 |
| 6653604 | Heater member for mounting heating object and substrate processing apparatus using the same | Masuhiro Natsuhara, Akira Kuibira, Kenji Shinma | 2003-11-25 |
| 6569524 | High thermal conductivity composite material, and method for producing the same | Chihiro Kawai | 2003-05-27 |
| 6554906 | Wafer holder for semiconductor manufacturing apparatus and semiconductor manufacturing apparatus using the same | Akira Kuibira | 2003-04-29 |
| 6548787 | Ceramic heater | Masuhiro Natsuhara, Syunji Nagao | 2003-04-15 |
| 6508884 | Wafer holder for semiconductor manufacturing apparatus, method of manufacturing wafer holder, and semiconductor manufacturing apparatus | Akira Kuibira, Kenjiro Higaki, Masuhiro Natsuhara, Takashi Ishii, Yasuyuki Matsui | 2003-01-21 |
| 6500052 | Method of polishing a ceramic substrate | Masuhiro Natsuhara, Motoyuki Tanaka, Yasuhisa Yushio | 2002-12-31 |
| 6460482 | Gas shower unit for semiconductor manufacturing apparatus and semiconductor manufacturing apparatus | Akira Kuibira | 2002-10-08 |
| 6458444 | Ceramic substrate and polishing method thereof | Masuhiro Natsuhara, Motoyuki Tanaka, Yasuhisa Yushio | 2002-10-01 |
| 6428741 | Aluminum nitride sintered body and method of preparing the same | Yasuhisa Yushio, Kazutaka Sasaki, Masuhiro Natsuhara, Motoyuki Tanaka, Yasuhiro Murase | 2002-08-06 |
| 6423400 | Susceptor for semiconductor manufacturing equipment and process for producing the same | Yasuhisa Yushio, Masuhiro Natsuhara | 2002-07-23 |
| 6403510 | Aluminum nitride sintered body and manufacturing method thereof | Akira Kuibira, Kenjiro Higaki, Kazutaka Sasaki, Takashi Ishii | 2002-06-11 |
| 6392197 | Ceramic heater for toner-fixing units and method for manufacturing the heater | Masuhiro Natsuhara | 2002-05-21 |
| 6384378 | Ceramic heater for toner-fixing units and method for manufacturing the heater | Masuhiro Natsuhara | 2002-05-07 |