Issued Patents All Time
Showing 1–25 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7999210 | Heating device for manufacturing semiconductor | Masuhiro Natsuhara, Hirohiko Nakata | 2011-08-16 |
| 7837798 | Semiconductor processing apparatus with a heat resistant hermetically sealed substrate support | Masuhiro Natsuhara, Hirohiko Nakata | 2010-11-23 |
| 7806984 | Semiconductor or liquid crystal producing device | Masuhiro Natsuhara, Hirohiko Nakata | 2010-10-05 |
| 7491432 | Ceramic susceptor for semiconductor manufacturing equipment | Yoshifumi Kachi, Hirohiko Nakata | 2009-02-17 |
| 7414823 | Holder for use in semiconductor or liquid-crystal manufacturing device and semiconductor or liquid-crystal manufacturing device in which the holder is installed | Manabu Hashikura, Hirohiko Nakata, Masuhiro Natsuhara | 2008-08-19 |
| 7408131 | Wafer holder and semiconductor manufacturing apparatus | Masuhiro Natsuhara, Hirohiko Nakata, Manabu Hashikura | 2008-08-05 |
| 7394043 | Ceramic susceptor | Masuhiro Natsuhara, Hirohiko Nakata | 2008-07-01 |
| 7361230 | Substrate processing apparatus | Masuhiro Natsuhara, Hirohiko Nakata, Kenji Shinma | 2008-04-22 |
| 7268321 | Wafer holder and semiconductor manufacturing apparatus | Masuhiro Natsuhara, Hirohiko Nakata, Manabu Hashikura | 2007-09-11 |
| 7268322 | Semiconductor heating apparatus | Hirohiko Nakata, Kenji Shinma | 2007-09-11 |
| 7264699 | Workpiece holder for processing apparatus, and processing apparatus using the same | Masuhiro Natsuhara, Hirohiko Nakata | 2007-09-04 |
| 7211153 | Ceramic joined body, substrate holding structure and substrate processing apparatus | Masuhiro Natsuhara, Hirohiko Nakata | 2007-05-01 |
| 7145106 | Heater module for semiconductor manufacturing equipment | Hirohiko Nakata | 2006-12-05 |
| 7090394 | Temperature gauge and ceramic susceptor in which it is utilized | Manabu Hashikura, Hirohiko Nakata, Masuhiro Natsuhara | 2006-08-15 |
| 7090423 | Connecting structures | Masuhiro Natsuhara, Hirohiko Nakata | 2006-08-15 |
| 7045045 | Workpiece holder for processing apparatus, and processing apparatus using the same | Masuhiro Natsuhara, Hirohiko Nakata | 2006-05-16 |
| 6963052 | Heater module for semiconductor manufacturing equipment | Hirohiko Nakata | 2005-11-08 |
| 6946625 | Ceramic susceptor | Masuhiro Natsuhara, Hirohiko Nakata | 2005-09-20 |
| 6806443 | Ceramic susceptor | Masuhiro Natsuhara, Hirohiko Nakata | 2004-10-19 |
| 6716304 | Wafer holder for semiconductor manufacturing apparatus, and method of manufacturing the wafer holder | Hirohiko Nakata, Kenjiro Higaki, Masuhiro Natsuhara, Takashi Ishii, Yasuyuki Matsui | 2004-04-06 |
| 6664515 | Circuit pattern of resistance heating elements and substrate-treating apparatus incorporating the pattern | Masuhiro Natsuhara, Masashi Narita, Hirohiko Nakata | 2003-12-16 |
| 6653604 | Heater member for mounting heating object and substrate processing apparatus using the same | Masuhiro Natsuhara, Hirohiko Nakata, Kenji Shinma | 2003-11-25 |
| 6554906 | Wafer holder for semiconductor manufacturing apparatus and semiconductor manufacturing apparatus using the same | Hirohiko Nakata | 2003-04-29 |
| 6508884 | Wafer holder for semiconductor manufacturing apparatus, method of manufacturing wafer holder, and semiconductor manufacturing apparatus | Hirohiko Nakata, Kenjiro Higaki, Masuhiro Natsuhara, Takashi Ishii, Yasuyuki Matsui | 2003-01-21 |
| 6460482 | Gas shower unit for semiconductor manufacturing apparatus and semiconductor manufacturing apparatus | Hirohiko Nakata | 2002-10-08 |