Issued Patents All Time
Showing 26–30 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6403510 | Aluminum nitride sintered body and manufacturing method thereof | Hirohiko Nakata, Kenjiro Higaki, Kazutaka Sasaki, Takashi Ishii | 2002-06-11 |
| 6365879 | Wafer holder for semiconductor manufacturing apparatus | Hirohiko Nakata | 2002-04-02 |
| 5922629 | Silicon nitride ceramic sliding material and process for producing the same | Jin-Joo Park, Yasushi Mochida, Osamu Komura, Akira Yamaguchi | 1999-07-13 |
| 5328876 | High strength silicon nitride sintered body and process for producing same | Takao Nishioka, Kenji Matsunuma, Yoshishige Takano, Matsuo Higuchi, Masaaki Honda +1 more | 1994-07-12 |
| 5234642 | High strength silicon nitride sintered body and process for producing same | Takao Nishioka, Kenji Matsunuma, Yoshishige Takano, Matsuo Higuchi, Masaaki Honda +1 more | 1993-08-10 |