Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12033880 | Wafer holding body | Koichi Kimura, Shigenobu SAKITA, Daisuke Shimao, Katsuhiro Itakura, Masuhiro Natsuhara +1 more | 2024-07-09 |
| 10886157 | Wafer holding unit | Koichi Kimura, Shigenobu SAKITA, Daisuke Shimao, Katsuhiro Itakura, Masuhiro Natsuhara +1 more | 2021-01-05 |
| 7361230 | Substrate processing apparatus | Masuhiro Natsuhara, Hirohiko Nakata, Akira Kuibira | 2008-04-22 |
| 7342204 | Heater and heating device | Masuhiro Natsuhara, Hirohiko Nakata | 2008-03-11 |
| 7306858 | Aluminum nitride sintered body | Masuhiro Natsuhara, Hirohiko Nakata | 2007-12-11 |
| 7279048 | Semiconductor manufacturing apparatus | Hirohiko Nakata, Masuhiro Natsuhara | 2007-10-09 |
| 7268322 | Semiconductor heating apparatus | Akira Kuibira, Hirohiko Nakata | 2007-09-11 |
| 6653604 | Heater member for mounting heating object and substrate processing apparatus using the same | Masuhiro Natsuhara, Hirohiko Nakata, Akira Kuibira | 2003-11-25 |
| 6599034 | Sealed airtight container for optical-semiconductors and optical-semiconductors module | Nobuyoshi Tatoh, Koji Nishi | 2003-07-29 |