Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11670522 | Processing liquid generator and substrate processing apparatus using the same | Kunihiro Miyazaki | 2023-06-06 |
| 10607863 | Substrate processing apparatus | Takashi Ootagaki | 2020-03-31 |
| 10586727 | Suction stage, lamination device, and method for manufacturing laminated substrate | Emi Matsui, Takahiro KANAI | 2020-03-10 |
| 10460961 | Substrate processing apparatus | Yuji Nagashima | 2019-10-29 |
| 10406566 | Substrate processing device and substrate processing method | Jun Matsushita, Yuji Nagashima, Kunihiro Miyazaki | 2019-09-10 |
| 10325787 | Substrate processing apparatus and substrate processing method | Takashi Ootagaki, Yuji Nagashima, Akinori Iso | 2019-06-18 |
| 10281210 | Substrate processing apparatus and substrate processing method | Kunihiro Miyazaki, Takashi Ootagaki, Yuji Nagashima | 2019-05-07 |
| 10276406 | Substrate processing device and substrate processing method | Masaaki Furuya, Takashi Ootagaki, Yuji Nagashima, Atsushi Kinase, Masahiro Abe | 2019-04-30 |
| 9972513 | Device and method for treating a substrate with hydrofluoric and nitric acid | Yuki Saito, Takashi Ootagaki, Yuji Nagashima | 2018-05-15 |
| 9964358 | Substrate processing apparatus and substrate processing method | Jun Matsushita, Takashi Miyamoto, Osamu Yamazaki | 2018-05-08 |
| 9966282 | Substrate processing apparatus and substrate processing method | Kunihiro Miyazaki, Kenji Minami, Yuji Nagashima | 2018-05-08 |
| 9811096 | Liquid feeding device and substrate treating device | Takashi Ootagaki, Emi Matsui | 2017-11-07 |
| 9795999 | Substrate processing apparatus and substrate processing method | Takashi Ootagaki, Yosuke Himori | 2017-10-24 |
| 9741596 | Bonding apparatus and bonding process method | Emi Matsui | 2017-08-22 |
| 9694371 | Substrate treatment apparatus and substrate treatment method | Takashi Ootagaki | 2017-07-04 |
| 9607865 | Substrate processing device and substrate processing method | Masaaki Furuya, Takashi Ootagaki, Yuji Nagashima, Atsushi Kinase, Masahiro Abe | 2017-03-28 |
| 9586391 | Bonding apparatus and method for manufacturing bonded substrate | Daisuke Matsushima | 2017-03-07 |
| 9553003 | Substrate processing device and substrate processing method | Masaaki Furuya, Takashi Ootagaki, Yuji Nagashima, Atsushi Kinase, Masahiro Abe | 2017-01-24 |
| 9202724 | Substrate treatment apparatus and substrate treatment method | — | 2015-12-01 |
| 8377251 | Spin processing apparatus and spin processing method | — | 2013-02-19 |