Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10406566 | Substrate processing device and substrate processing method | Yuji Nagashima, Konosuke Hayashi, Kunihiro Miyazaki | 2019-09-10 |
| 9964358 | Substrate processing apparatus and substrate processing method | Takashi Miyamoto, Konosuke Hayashi, Osamu Yamazaki | 2018-05-08 |
| 8905468 | Sunshade apparatus | Takashi Kitani, Kazuhiko YOSHIZAWA | 2014-12-09 |