Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11322384 | Substrate processing apparatus and substrate processing method | Shunya Kubota, Katsuhiro Yamazaki, Yoshikazu Ohtani, Kyouhei TOMIOKA | 2022-05-03 |
| 10586727 | Suction stage, lamination device, and method for manufacturing laminated substrate | Konosuke Hayashi, Takahiro KANAI | 2020-03-10 |
| 9811096 | Liquid feeding device and substrate treating device | Konosuke Hayashi, Takashi Ootagaki | 2017-11-07 |
| 9741596 | Bonding apparatus and bonding process method | Konosuke Hayashi | 2017-08-22 |
| 9718710 | Treatment apparatus and method for reusing treatment liquid | Masaaki Hirakawa | 2017-08-01 |