Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11322384 | Substrate processing apparatus and substrate processing method | Shunya Kubota, Emi Matsui, Yoshikazu Ohtani, Kyouhei TOMIOKA | 2022-05-03 |
| 10573540 | Substrate processing apparatus and substrate processing method | Nobuo Kobayashi, Takeki Kogawa, Yuki Saito | 2020-02-25 |
| 9513557 | Method for manufacturing reflective mask and apparatus for manufacturing reflective mask | Kensuke Demura | 2016-12-06 |
| 8999612 | Method for manufacturing reflective mask and apparatus for manufacturing reflective mask | Kensuke Demura | 2015-04-07 |
| 8524102 | Ashing method and ashing device | — | 2013-09-03 |
| 8088296 | Plasma processing device and plasma processing method | — | 2012-01-03 |
| 7146734 | Rolling elements for rolling bearing, method of producing the same, and rolling bearing | Takashi Murai, Haruki Tsutsui | 2006-12-12 |
| 6752696 | Rolling elements for rolling bearing, method of producing the same, and rolling bearing | Takashi Murai, Haruki Tsutsui | 2004-06-22 |
| 4845327 | Microwave oven having automatic bread making function | Koji Iwabuchi, Masaharu Tawada, Noriyuki Kanagawa, Mituhiro Aoyama, Kazuo Kaneko | 1989-07-04 |