SK

Shunya Kubota

SM Shibaura Mechatronics: 1 patents #96 of 175Top 55%
SC Shin-Etsu Engineering Co.: 1 patents #4 of 16Top 25%
Overall (All Time): #2,653,062 of 4,157,543Top 65%
1
Patents All Time

Issued Patents All Time

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11322384 Substrate processing apparatus and substrate processing method Emi Matsui, Katsuhiro Yamazaki, Yoshikazu Ohtani, Kyouhei TOMIOKA 2022-05-03