Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11654513 | Workpiece-separating device and workpiece-separating method | Kyouhei TOMIOKA | 2023-05-23 |
| 11633810 | Workpiece-separating device and workpiece-separating method | Kyouhei TOMIOKA | 2023-04-25 |
| 11322384 | Substrate processing apparatus and substrate processing method | Shunya Kubota, Emi Matsui, Katsuhiro Yamazaki, Kyouhei TOMIOKA | 2022-05-03 |
| 11251058 | Workpiece-separating device and workpiece-separating method | Kyouhei TOMIOKA | 2022-02-15 |
| 10840141 | Workpiece-separating device and workpiece-separating method | Kyouhei TOMIOKA | 2020-11-17 |
| 6351367 | Electrostatic holding apparatus having insulating layer with enables easy attachment and detachment of semiconductor object | Hiroshi Mogi, Kenichi Arai, Shinji Kojima, Toshimi Kobayashi | 2002-02-26 |