Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10573540 | Substrate processing apparatus and substrate processing method | Nobuo Kobayashi, Katsuhiro Yamazaki, Yuki Saito | 2020-02-25 |
| 8107064 | Disc wafer inspecting device and inspecting method | Yoshinori Hayashi, Hideki Mori, Akimasa Hori | 2012-01-31 |
| 8094923 | Wafer containing cassette inspection device and method | Yoshinori Hayashi, Hideki Mori | 2012-01-10 |