Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11626299 | Cover for swing member of substrate processing apparatus, swing member of substrate processing apparatus, and substrate processing apparatus | Hisajiro Nakano, Tomoatsu Ishibashi | 2023-04-11 |
| 10361101 | Substrate cleaning apparatus and substrate processing apparatus X | Hisajiro Nakano, Junji Kunisawa | 2019-07-23 |