Issued Patents All Time
Showing 26–50 of 55 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6595831 | Method for polishing workpieces using fixed abrasives | Kazuto Hirokawa, Yutaka Wada, Hisanori Matsuo, Noburu Shimizu | 2003-07-22 |
| 6579148 | Polishing apparatus | Kazuto Hirokawa, Yutaka Wada, Hisanori Matsuo, Tetsuji Togawa | 2003-06-17 |
| 6520845 | Polishing apparatus | Kazuto Hirokawa, Yutaka Wada, Hisanori Matsuo | 2003-02-18 |
| 6458012 | Polishing apparatus | Kazuto Hirokawa, Yutaka Wada, Hisanori Matsuo, Tetsuji Togawa | 2002-10-01 |
| 6454644 | Polisher and method for manufacturing same and polishing tool | Hisamitsu Miyazaki, Yutaka Wada | 2002-09-24 |
| 6413155 | Polishing apparatus | Hisanori Matsuo, Yutaka Wada, Kazuto Hirokawa | 2002-07-02 |
| 6413149 | Abrading plate and polishing method using the same | Yutaka Wada, Kazuto Hirokawa, Hisanori Matsuo | 2002-07-02 |
| 6406364 | Polishing solution feeder | Norio Kimura, Yutaka Wada, Kiyotaka Kawashima, Manabu Tsujimura, Takayoshi Kawamoto | 2002-06-18 |
| 6402588 | Polishing apparatus | Hisanori Matsuo, Yutaka Wada, Kazuto Hirokawa | 2002-06-11 |
| 6398626 | Polishing apparatus | Hisanori Matsuo, Yutaka Wada, Kazuto Hirokawa, Tetsuji Togawa | 2002-06-04 |
| 6390901 | Polishing apparatus | Yutaka Wada, Kazuto Hirokawa, Hisanori Matsuo, Tetsuji Togawa, Satoshi Wakabayashi | 2002-05-21 |
| 6336850 | Slurry dispenser and polishing apparatus | Yutaka Wada, Kazuto Hirokawa, Hisanori Matsuo | 2002-01-08 |
| 6325698 | Cleaning method and polishing apparatus employing such cleaning method | Yutaka Wada, Norio Kimura | 2001-12-04 |
| 6315643 | Polishing apparatus and method | Seiyo Maekawa, Yutaka Wada | 2001-11-13 |
| 6261162 | Polishing apparatus and method of manufacturing grinding plate | Kazuto Hirokawa, Yutaka Wada, Hisanori Matsuo | 2001-07-17 |
| 6220945 | Polishing apparatus | Kazuto Hirokawa, Yutaka Wada, Hisanori Matsuo | 2001-04-24 |
| 6217411 | Polishing apparatus | Yutaka Wada, Kazuto Hirokawa, Hisanori Matsuo | 2001-04-17 |
| 6196904 | Polishing apparatus | Hisanori Matsuo, Yutaka Wada, Kazuto Hirokawa | 2001-03-06 |
| 6190243 | Polishing apparatus | Yutaka Wada, Kazuto Hirokawa, Hisanori Matsuo | 2001-02-20 |
| 6102786 | Polishing apparatus including turntable with polishing surface of different heights | Masayoshi Hirose, Yoshimi Sasaki, Akira Ogata, Seiji Ishikawa, Tamami Takahashi +1 more | 2000-08-15 |
| 6015337 | Polishing apparatus | Yutaka Wada | 2000-01-18 |
| 5888126 | Polishing apparatus including turntable with polishing surface of different heights | Masayoshi Hirose, Yoshimi Sasaki, Akira Ogata, Seiji Ishikawa, Tamami Takahashi +1 more | 1999-03-30 |
| 5882244 | Polishing apparatus | Yutaka Wada, Tamami Takahashi | 1999-03-16 |
| 5857898 | Method of and apparatus for dressing polishing cloth | Norio Kimura, Tomoyuki Yahiro | 1999-01-12 |
| 5838447 | Polishing apparatus including thickness or flatness detector | Yutaka Wada | 1998-11-17 |