Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5876273 | Apparatus for polishing a wafer | Hiroyuki Yano, Katsuya Okumura, Norio Kimura, Hozumi Yasuda | 1999-03-02 |
| 5857898 | Method of and apparatus for dressing polishing cloth | Hirokuni Hiyama, Norio Kimura | 1999-01-12 |
| 5543615 | Beam charge exchanging apparatus | Mutsumi Saito, Masahiro Hatakeyama | 1996-08-06 |