Issued Patents All Time
Showing 1–25 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7588671 | Microfluidic treatment method and device | Tomoyuki Morita, Akiko Miya, Akira Fukuda, Motohiko Nomi, Manabu Tsujimura +1 more | 2009-09-15 |
| 7314574 | Etching method and apparatus | Kazuo Yamauchi, Hirokuni Hiyama, Seiji Samukawa | 2008-01-01 |
| 7144520 | Etching method and apparatus | Kazuo Yamauchi, Hirokuni Hiyama, Seiji Samukawa | 2006-12-05 |
| 7115354 | Microfabrication of pattern imprinting | Masahiro Hatakeyama, Tohru Satake, Yotaro Hatamura, Masayuki Nakao | 2006-10-03 |
| 7078862 | Beam source and beam processing apparatus | Akira Fukuda, Akio Shibata, Hirokuni Hiyama, Kazuo Yamauchi, Seiji Samukawa | 2006-07-18 |
| 7034285 | Beam source and beam processing apparatus | Akio Shibata, Akira Fukuda, Hirokuni Hiyama, Kazuo Yamauchi, Seiji Samukawa | 2006-04-25 |
| 6949735 | Beam source | Masahiro Hatakeyama, Kenji Watanabe, Tohru Satake | 2005-09-27 |
| 6909086 | Neutral particle beam processing apparatus | Seiji Samukawa, Kazuo Yamauchi, Hirokuni Hiyama | 2005-06-21 |
| 6909087 | Method of processing a surface of a workpiece | Kazuo Yamauchi, Hirokuni Hiyama, Seiji Samukawa | 2005-06-21 |
| 6861642 | Neutral particle beam processing apparatus | Kazuo Yamauchi, Hirokuni Hiyama, Seiji Samukawa | 2005-03-01 |
| 6861643 | Neutral particle beam processing apparatus | Kazuo Yamauchi, Hirokuni Hiyama, Seiji Samukawa | 2005-03-01 |
| 6858838 | Neutral particle beam processing apparatus | Kazuo Yamauchi, Hirokuni Hiyama, Seiji Samukawa | 2005-02-22 |
| 6849857 | Beam processing apparatus | Kazuo Yamauchi, Hirokuni Hiyama, Seiji Samukawa | 2005-02-01 |
| 6671034 | Microfabrication of pattern imprinting | Masahiro Hatakeyama, Tohru Satake, Yotaro Hatamura, Masayuki Nakao | 2003-12-30 |
| 6627095 | Magnetic recording disk and method of manufacturing same | Masahiro Hatakeyama, Kenji Watanabe, Kazuo Yamauchi, Shinta Kunitomo, Yasushi Tohma +1 more | 2003-09-30 |
| 6468598 | Magnetic disk and method of making thereof | Masahiro Hatakeyama, Kenji Watanabe, Kazuo Yamauchi, Shinta Kunitomo, Tohru Satake +2 more | 2002-10-22 |
| 6194048 | Magnetic recording disk | Masahiro Hatakeyama, Kenji Watanabe, Kazuo Yamauchi, Shinta Kunitomo, Yasushi Tohma +1 more | 2001-02-27 |
| 6099698 | Magnetic disc and method of manufacturing same | Masahiro Hatakeyama, Kenji Watanabe, Kazuo Yamauchi, Shinta Kunitomo, Tohru Satake +2 more | 2000-08-08 |
| 6048671 | Ultra-fine microfabrication method using an energy beam | Masahiro Hatakeyama, Yotaro Hatamura | 2000-04-11 |
| 6015976 | Fabrication apparatus employing energy beam | Masahiro Hatakeyama, Takao Kato, Yotaro Hatamura, Masayuki Nakao | 2000-01-18 |
| 6010831 | Ultra-fine microfabrication method using an energy beam | Masahiro Hatakeyama, Yotaro Hatamura | 2000-01-04 |
| 6007969 | Ultra-fine microfabrication method using an energy beam | Masahiro Hatakeyama, Yotaro Hatamura | 1999-12-28 |
| 5998097 | Fabrication method employing energy beam source | Masahiro Hatakeyama, Tadasuke Kobata, Yotaro Hatamura, Masayuki Nakao | 1999-12-07 |
| 5989779 | Fabrication method employing and energy beam source | Masahiro Hatakeyama, Tadasuke Kobata, Yotaro Hatamura, Masayuki Nakao | 1999-11-23 |
| 5894058 | Ultra-fine microfabrication method using a fast atomic energy beam | Masahiro Hatakeyama, Yotaro Hatamura | 1999-04-13 |