Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9245715 | Drawing apparatus, and method of manufacturing article | Masato Muraki | 2016-01-26 |
| 9236224 | Drawing apparatus and method of manufacturing article | — | 2016-01-12 |
| 9171698 | Drawing apparatus, and method of manufacturing article | Masato Muraki | 2015-10-27 |
| 9040935 | Blanking apparatus, drawing apparatus, and method of manufacturing article | Masato Muraki | 2015-05-26 |
| 8927945 | Drawing apparatus and method of manufacturing article by controlling drawing on shot region side of boundary of shot regions | — | 2015-01-06 |
| 8759797 | Drawing apparatus, drawing method, and method of manufacturing article | Masato Muraki | 2014-06-24 |
| 8618497 | Drawing apparatus, method of manufacturing article, and information processing apparatus | Shinji Ohishi | 2013-12-31 |
| 7588671 | Microfluidic treatment method and device | Akiko Miya, Akira Fukuda, Motohiko Nomi, Katsunori Ichiki, Manabu Tsujimura +1 more | 2009-09-15 |
| 6875819 | Fluorinated cycloolefin polymers, processes for preparation of fluorinated cycloofefin monomers and polymers thereof, and use of the same | Tadahiro Sunaga, Hiroshi Kouno, Kazumori Kawamura, Takashi Ochiai, Shigeto Shigematsu +3 more | 2005-04-05 |
| 6780764 | Method of forming a patterned tungsten damascene interconnect | Yusuke Harada | 2004-08-24 |
| 6706645 | Method of manufacturing a semiconductor device | Yusuke Harada | 2004-03-16 |
| 6458716 | Method of manufacturing a semiconductor device | Yusuke Harada | 2002-10-01 |