Issued Patents All Time
Showing 26–49 of 49 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8507883 | Extreme ultraviolet light source apparatus | Akira Endo, Hideo Hoshino, Kouji Kakizaki, Tamotsu Abe, Akira Sumitani +3 more | 2013-08-13 |
| 8395133 | Apparatus and method of adjusting a laser light source for an EUV source device | Masato Moriya, Hideo Hoshino, Osamu Wakabayashi | 2013-03-12 |
| 8212228 | Extreme ultra violet light source apparatus | Tamotsu Abe, Toshihiro Nishisaka, Hiroshi Someya, Masato Moriya, Takeshi Asayama +1 more | 2012-07-03 |
| 7984539 | Chamber replacing method | Junichi Fujimoto, Tatsuo Enami | 2011-07-26 |
| 7078717 | Light source device and exposure equipment using the same | — | 2006-07-18 |
| 7067832 | Extreme ultraviolet light source | Akira Endo, Hirokazu Tanaka | 2006-06-27 |
| 6839373 | Ultra-narrow band flourine laser apparatus | Kiwamu Takehisa, Shinji Nagai, Tatsumi Gotou | 2005-01-04 |
| 6819699 | Arf excimer laser device, scanning type exposure device and ultraviolet laser device | Tatsuo Enami, Osamu Wakabayashi, Katsutomo Terashima, Kiwamu Takehisa, Tsukasa HORI | 2004-11-16 |
| 6810061 | Discharge electrode and discharge electrode manufacturing method | Tsukasa HORI, Akira Sumitani, Takayuki Yabu, Teiichirou Chiba, Osamu Wakabayashi +1 more | 2004-10-26 |
| 6639929 | Pulse oscillating gas laser device | Koji Kakizaki, Takashi Saito, Naoki Kataoka | 2003-10-28 |
| 6337872 | Once through fan for excimer laser apparatus | Hisashi Nara, Kiyoharu Nakao, Toshihiro Nishisaka, Tatsuo Enami | 2002-01-08 |
| 6130904 | Gas supplementation method of excimer laser apparatus | Takanobu Ishihara, Junichi Fujimoto | 2000-10-10 |
| 6101211 | Narrow-band laser apparatus | Osamu Wakabayashi, Hiroshi Komori | 2000-08-08 |
| 6008497 | Laser appartus | Osamu Wakabayashi, Yukio Kobayashi, Yoshiho Amada, Tatsuo Mimura | 1999-12-28 |
| 5754579 | Laser gas controller and charging/discharging device for discharge-excited laser | Toshihiro Nishisaka, Hiroshi Komori | 1998-05-19 |
| 5663977 | Gas laser apparatus | Junichi Fujimoto | 1997-09-02 |
| 5642374 | Excimer laser device | Osamu Wakabayashi | 1997-06-24 |
| 5557629 | Laser device having an electrode with auxiliary conductor members | Yoshiho Amada, Noritoshi Ito | 1996-09-17 |
| 5535233 | Laser device | Yoshiho Amada, Noritoshi Ito | 1996-07-09 |
| 5450436 | Laser gas replenishing apparatus and method in excimer laser system | Junichi Fujimoto, Masahiko Kowaka, Tomokazu Takahashi | 1995-09-12 |
| 5373523 | Excimer laser apparatus | Junichi Fujimoto, Yoshiho Amada, Osamu Wakabayashi | 1994-12-13 |
| 5291509 | Gas laser apparatus | Junichi Fujimoto, Yoshiho Amada | 1994-03-01 |
| 4745614 | Silent discharge type laser device | Akira Egawa, Kiyonori Matsuno, Tatsuya Ariga, Ryoichi Nodomi | 1988-05-17 |
| 4571730 | Cross flow type laser devices | Akira Egawa, Akira Okamoto | 1986-02-18 |