Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11036150 | Extreme ultraviolet light generation apparatus and maintenance method | — | 2021-06-15 |
| 11007778 | Droplet discharge apparatus and calculation method | — | 2021-05-18 |
| 10925143 | Laser apparatus and EUV light generating system | — | 2021-02-16 |
| 9229192 | Mirror device | Hiroshi Someya, Yukio Watanabe, Osamu Wakabayashi | 2016-01-05 |
| 9046651 | Mirror device | Hiroshi Someya, Yukio Watanabe, Osamu Wakabayashi | 2015-06-02 |