Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12150233 | Target substance replenishment device, extreme ultraviolet light generation apparatus, and electronic device manufacturing method | Yutaka Shiraishi | 2024-11-19 |
| 10073353 | Target supply device and EUV light generation apparatus | Yutaka Shiraishi | 2018-09-11 |
| 5306339 | Ceramic die for molding glass member | Shuichi Takeda, Takeji Kajiura | 1994-04-26 |
| 5139720 | Method of producing sintered ceramic material | Shuichi Takeda | 1992-08-18 |