Issued Patents All Time
Showing 26–39 of 39 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9497842 | System and method for generating extreme ultraviolet light | Kouji Kakizaki, Tatsuya Yanagida, Osamu Wakabayashi, Hakaru Mizoguchi | 2016-11-15 |
| 9265136 | System and method for generating extreme ultraviolet light | Kouji Kakizaki, Tatsuya Yanagida, Osamu Wakabayashi, Hakaru Mizoguchi | 2016-02-16 |
| 9167678 | System and method for generating extreme ultraviolet light | Kouji Kakizaki, Tatsuya Yanagida, Osamu Wakabayashi | 2015-10-20 |
| 9113540 | System and method for generating extreme ultraviolet light | Kouji Kakizaki, Tatsuya Yanagida, Osamu Wakabayashi | 2015-08-18 |
| 9055657 | Extreme ultraviolet light generation by polarized laser beam | Junichi Fujimoto, Osamu Wakabayashi | 2015-06-09 |
| 8742380 | Target supply device, extreme ultraviolet light generation apparatus, and method for supplying target | Hideo Hoshino, Tatsuya Yanagida | 2014-06-03 |
| 8710475 | Extreme ultraviolet light source device and method for generating extreme ultraviolet light | Hiroshi Komori, Tatsuya Yanagida, Yoshifumi Ueno, Akira Sumitani, Akira Endo | 2014-04-29 |
| 8471226 | Extreme ultraviolet light source device and method for producing extreme ultraviolet light | Hiroshi Komori, Tatsuya Yanagida, Yoshifumi Ueno, Akira Sumitani, Akira Endo | 2013-06-25 |
| 7782922 | Excimer laser device operable at high repetition rate and having high band-narrowing efficiency | Takanobu Ishihara, Kouji Kakizaki | 2010-08-24 |
| 7006546 | Gas laser electrode, laser chamber employing the electrode, and gas laser device | Junichi Fujimoto, Takayuki Yabu | 2006-02-28 |
| 6819699 | Arf excimer laser device, scanning type exposure device and ultraviolet laser device | Tatsuo Enami, Osamu Wakabayashi, Katsutomo Terashima, Kiwamu Takehisa, Hakaru Mizoguchi | 2004-11-16 |
| 6810061 | Discharge electrode and discharge electrode manufacturing method | Akira Sumitani, Takayuki Yabu, Teiichirou Chiba, Hakaru Mizoguchi, Osamu Wakabayashi +1 more | 2004-10-26 |
| 6628693 | Discharge electrode for laser device | Takanobu Ishihara, Hirotoshi Inoue | 2003-09-30 |
| 6507596 | Gas laser apparatus | Takanobu Ishihara, Hirotoshi Inoue, Takashi Matsunaga | 2003-01-14 |