Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10582600 | Droplet collection device | Fumio Iwamoto | 2020-03-03 |
| 10524342 | Droplet collection device | — | 2019-12-31 |
| 10028366 | Extreme UV light generation device and target recovery apparatus | Tsukasa HORI, Fumio Iwamoto | 2018-07-17 |
| 9961755 | Extreme ultraviolet light generation device | Hiroshi Umeda | 2018-05-01 |