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Active cooling substrate support |
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2014-04-29 |
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Sensors for dynamically detecting substrate breakage and misalignment of a moving substrate |
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Electronic device manufacturing component with an embedded chip and methods of using the same |
Paohuei Lee, Suhail Anwar, Janusz Jozwiak |
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Sensors for dynamically detecting substrate breakage and misalignment of a moving substrate |
Paohuei Lee, Kyung Tae Kim, Sam Kim, Toshio Kiyotake, Takayuki Matsumoto +4 more |
2008-10-21 |
| 7270713 |
Tunable gas distribution plate assembly |
Wendell T. Blonigan, John M. White |
2007-09-18 |
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Pedestal for flat panel display applications |
Ericka M. Ramirez, Stephen C. Wolgast |
2005-08-02 |
| 6528767 |
Pre-heating and load lock pedestal material for high temperature CVD liquid crystal and flat panel display applications |
Ericka M. Ramirez, Stephen C. Wolgast |
2003-03-04 |
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Substrate support and method of fabricating the same |
Naomi Matsumura, Masahiko Kowaka, Akira Terashi, Hideaki Kondo |
2003-01-28 |
| 4654147 |
Automated system for continuous monitoring and control of the amount of dissolved oxygen in a plurality of marine life farming pools or sewage treatment installations |
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1987-03-31 |
