Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11532464 | Reactor design for large-area VHF plasma processing with improved uniformity | Shuran Sheng, Shinobu ABE, Keita KUWAHARA, Chang-Hee Shin | 2022-12-20 |
| 10991994 | Temperature monitoring apparatus and method for battery pack | Chi-Ho Moon, Kyung-Hoon Suk, Hong-Seok Ju | 2021-04-27 |
| 10913032 | 3D polymer nanofiber membrane composed of 1D individual polymer nanofibers which are quasi-aligned and cross-laminated like grid structure with functions of controlling pore distribution and size, and manufacturing method thereof | Il-Doo Kim, Chanhoon Kim, Won Tae Hwang | 2021-02-09 |
| 10453728 | Exchange and flip chamber design for heterojunction solar cell formation | Kyung Tae Kim, Tsunehiko KITAMURA, Shinobu ABE, Shuran Sheng | 2019-10-22 |
| 10047440 | Methods and apparatus for uniformly and high-rate depositing low resistivity microcrystalline silicon films for display devices | Shuran Sheng | 2018-08-14 |
| 10043641 | Methods and apparatus for processing chamber cleaning end point detection | Young Jin Choi, Beomsoo Park, Fei Peng, Soo Young Choi | 2018-08-07 |
| 8709162 | Active cooling substrate support | Samuel Leung, William Bagley | 2014-04-29 |