KK

Keita KUWAHARA

Applied Materials: 1 patents #4,780 of 7,310Top 70%
Overall (All Time): #2,700,677 of 4,157,543Top 65%
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Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11532464 Reactor design for large-area VHF plasma processing with improved uniformity Shuran Sheng, Shinobu ABE, Chang-Hee Shin, Su Ho Cho 2022-12-20