Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8597478 | Method for manufacturing a sputtering target structure | Tsutomu Kuniya, Nobuyuki Suzuki | 2013-12-03 |
| 6510888 | Substrate support and method of fabricating the same | Naomi Matsumura, Masahiko Kowaka, William Bagley, Hideaki Kondo | 2003-01-28 |